Ultra High Vacuum system
Our setup has three beam lines feeding in at different angles to a central ultra-high-vacuum chamber.
The sample sits in a flexible sample holder, which can be rotated to face any of the three beam lines or even two at a time.
Beam lines
1. Ion implanter - shoots an ion of any element of the periodic table into the sample.
2. Electron beam annealer - fires rounds of electrons at the sample surface to heat it up.
3. RBS beam line – analysis of the structure and composition of the top 200-3200nm of the surface.
Example:
RBS data showing differences in stoichiometry of TiN films guiding their corrosion properties of TiN coated materials.