Ultra High Vacuum system

ultra high vacuum system

Our setup has three beam lines feeding in at different angles to a central ultra-high-vacuum chamber.

The sample sits in a flexible sample holder, which can be rotated to face any of the three beam lines or even two at a time.

Beam lines

1. Ion implanter - shoots an ion of any element of the periodic table into the sample.
2. Electron beam annealer - fires rounds of electrons at the sample surface to heat it up.
3. RBS beam line – analysis of the structure and composition of the top 200-3200nm of the surface.

Example:

RBS data showing differences in stoichiometry of TiN films guiding their corrosion properties of TiN coated materials.

RBS data showing differences in stoichiometry of TIN films quiding their corrosion properties