Ultra High Vacuum system

ultra high vacuum system

Our setup has three beam lines feeding in at different angles to a central ultra-high-vacuum chamber.

The sample sits in a flexible sample holder, which can be rotated to face any of the three beam lines or even two at a time.

Beam lines

1. Ion implanter - shoots an ion of any element of the periodic table into the sample.
2. Electron beam annealer - fires rounds of electrons at the sample surface to heat it up.
3. RBS beam line – analysis of the structure and composition of the top 200-3200nm of the surface.


RBS data showing differences in stoichiometry of TiN films guiding their corrosion properties of TiN coated materials.

RBS data showing differences in stoichiometry of TIN films quiding their corrosion properties