Elemental Analysis
High resolution quantitative elemental analysis
-
All elements in the periodic table
- Depth profiles of elements - typical resolution 10nm
Common sample types
- Thin films (up to 5 mm thick)
- Nano-surfaces
- Metals
- Ceramics
- Superconductors
- Materials
- Soils
- Environmental samples
| Technique | Elements | Detection limit |
| NRA | C, N, O, B, Li, F | 0.1 ppm |
| PIXE | Na - U | 0.1-1 ppm |
| RBS (depth profile) | C, N, O | 10 ppm (20 nm) |
| PIGE | Na, F, B, Mg, Al | 100 ppm |