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Ion Implantation Equipment

At GNS Science, we design and build ion implantation equipment for you that feature great flexibility and ease of service and maintenance. Our ion implanters and components have been developed to cater for the needs of laboratory research for both scientists and commercial researchers in nanoscience and advanced materials.

"The main components were design and fabricated in 2013 by GNS Science New Zealand, and the system was assembled on ANSTO site and integrated into the SIRIUS 6MV accelerator system at the beginning of 2014.
Since the installation was completed LEII was tested and it runs routinelly. It is a very robust system, with excellent performance and easy maintenance. Its design  specifications were achieved, and both the technical and the scientific staff at ANSTO is very pleased with its performance.
LEII implanter was dellivered on time and the quality of the workmanship is of the highest standard. In particular the technical support from GNS-NZ during and after installation was very good and appreciated."

Dr Mihail Ionescu, Senior Research Scientist Ion Beam Accelerators, Institute for Environmental Research (IER), ANSTO

GNS Ion Implanter at ANSTO

The LEII implanter, designed and made by GNS Science, is integrated into the acceleration system at ANSTO

Highlights

  • Custom-built to integrate with your existing experimental and industrial scale equipment
  • Semi-automated, versatile, low maintenance and user friendly ion implantation system
  • Can implant any solid material with elements and isotopes
  • All elements in the periodic table
  • Proven technology, scientific guidance and technical support

Technical Features

  • Wide energy range (eV to tens of kV): Low energy 5 KV-20 KV / Medium energy 20 KV-50 KV / High Energy 50 KV – 200 KV
  • Single, or interlinked to implant 2 different ion species simultaneously
  • In-situ ion implanters combining ion implantation, RBS and electron beam annealing
  • High ion current (up to mA on target)
  • Multiple charge states of ions
  • Fast target exchange system
  • Molecular ion beam
  • Use of liquid nitrogen optional
  • USB inter-face option
GNS Implanter ion species

Elemental Species Experimented with GNS Science Ion Implanter by 2016

 

Elemental Species Experimented with GNS Ion Implanter by 2014

Ion Implantation System Components

  • Ion source
  • Einzel lens
  • Electromagnet
  • X-Y steerer
  • Quadrupole lens
  • Faraday cup
  • X-Y scanner
  • Deceleration stage
GNS Ion Beam Implanters Sketch - You do not have permission to view this object.

Publications

Kennedy, J.V.; Leveneur, J.; Fang, F.; Markwitz, A. 2014 Enhanced reduction of silicon oxide thin films on silicon under electron beam annealing. Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 332: 421-425; doi: 10.1016/j.nimb.2014.02.110 [August 2014] [Link to electronic copy]

Murmu, P.P.; Markwitz, A.; Suschke, K.; Futter, R.J. 2014 A novel radial anode layer ion source for inner wall pipe coating and materials modification : hydrogenated diamond-like carbon coatings from butane gas. Review of scientific instruments, 85(8): article 085118; doi: 10.1063/1.4892813 [August 2014]

Fang, F.; Johnson, P.B.; Kennedy, J.V.; Markwitz, A. 2013 Magnetic-ion-doped silicon nanostructures fabricated by ion implantation and electron beam annealing. p. 131-136; doi: 10.1016/j.nimb.2012.11.071 IN: Wang, K-M.; Wang, X.; Liu, B-X.; Chen, F.; Wang, X-L. (eds) The 18th International Conference on Ion Beam Modifications of Materials (IBMM2012). Elsevier. Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms 307. [June 2013] [Link to electronic copy]

Carder, D.A.; Markwitz, A.; Reeves, R.J.; Kennedy, J.V.; Fang, F. 2013 Atomic retention and near infrared photoluminescence from PbSe nanocrystals fabricated by sequential ion implantation and electron beam annealing. p. 154-157; doi: 10.1016/j.nimb.2012.12.078 IN: Wang, K-M.; Wang, X.; Liu, B-X.; Chen, F.; Wang, X-L. (eds) The 18th International Conference on Ion Beam Modifications of Materials (IBMM2012). Elsevier. Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms 307. [June 2013] [Link to electronic copy]

Contact

Andreas Markwitz,
Ion Beam Scientist  
Phone: +64 4 570 4785